Evaluation of halomethylated poly(methylphenylsilane)s as electron-beam resists

Journal of Materials Chemistry

Volumn 7, Issue 9, 1997, Pages 1701-1707

  Holder, Simon J ^a   Jones, Richard G ^a   Murphy, Julian J ^a  

^a UNIVERSITY OF KENT   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001135623     PISSN: 09599428     EISSN: None     Source Type: Journal    
DOI: 10.1039/a700413c     Document Type: Review

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