IR laser-induced decomposition of 2-chloroethenylsilane for chemical vapour deposition of Si/C phases

Journal of Materials Chemistry

Volumn 6, Issue 6, 1996, Pages 975-981

  Santos, M ^a   Diaz L ^d   Bastl, Z ^b   Hulinsky V ^c   Urbanova M ^d   Vitek J ^d   Pola, J ^d  

^a INSTITUTO DE ESTRUCTURA DE LA MATERIA   (Spain)

^b J HEYROVSKÝ INSTITUTE OF PHYSICAL CHEMISTRY   (Czech Republic)

^c INSTITUTE OF CHEMICAL TECHNOLOGY   (Czech Republic)

^d INSTITUTE OF CHEMICAL PROCESS FUNDAMENTALS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001134763     PISSN: 09599428     EISSN: None     Source Type: Journal    
DOI: 10.1039/JM9960600975     Document Type: Article

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