Radio frequency discharge modeling: Moment equations approach

Journal of Applied Physics

Volumn 74, Issue 4, 1993, Pages 2250-2259

  Meyyappan, M ^a   Govindan, T R ^a  

^a Scientific Research Associates Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001127309     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.354708     Document Type: Article

References (0)