Plasma properties at the transition from remote to direct plasma

Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 1590-1599

  Schiller, Matthias ^a   Kulisch, Wilhelm ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

Capacitive plasma; Inductive plasma; Langmuir double probe; Remote plasma; Retarding field energy analyser

Indexed keywords

EID: 0001113239     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00302-2     Document Type: Article

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