X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems

Journal of Applied Physics

Volumn 81, Issue 11, 1997, Pages 7386-7391

  Choi, W K ^a   Poon, F W ^a   Loh, F C ^a   Tan, K L ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001095249     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365278     Document Type: Article

References (12)

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