SCOPUS 정보 검색 플랫폼

Volumn 5, Issue 6-8, 1996, Pages 845-849

ECR plasma polishing of CVD diamond films

Author keywords

Diamond films; ECR plasma; Plasma etching behavior; Plasma polishing

Indexed keywords

EID: 0001072297 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/0925-9635(95)00484-x Document Type: Article

Times cited : (38)

References (12)

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