A modified broad beam ion source for low-energy hydrogen implantation

Review of Scientific Instruments

Volumn 69, Issue 3, 1998, Pages 1499-1504

  Otte, K ^a   Schindler, A ^a   Bigl, F ^a   Schlemm, H ^b  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b JENION Ion Beam and Surf Technique   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001069805     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148786     Document Type: Article

References (23)

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