Water-induced room-temperature oxidation of Si-H and -Si-Si- bonds in silicon oxide

Journal of Applied Physics

Volumn 80, Issue 2, 1996, Pages 1171-1176

  Liao, Wen Shiang ^a   Lee, Si Chen ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001053614     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.362915     Document Type: Article

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