Overlay measurements and edge detection methods

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3050, Issue , 1997, Pages 418-424

  Zaslavsky, Alexander I ^a  

^a KLA TENCOR CORPORATION   (United States)

Author keywords

Band limited signals; Edge detection; Overlay measurements; Precision of measurements; Subpixel position estimation

Indexed keywords

PROCESS CONTROL;

BAND LIMITED SIGNALS; DISCRETE SIGNALS; EDGE DETECTION METHODS; LARGE CLASS; OVERLAY MEASUREMENTS; PRECISION OF MEASUREMENTS; SUBPIXEL POSITION ESTIMATION;

EDGE DETECTION;

EID: 0001032962     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.275928     Document Type: Conference Paper

References (5)

1. D. Nyssonen and B. Monteverde. "Linewidth edge detection algorithm for coherent image profiles" Integrated Circuit Metrology, Inspection, and Process Control III SPIE 1087, pp. 146-152. 1989.
2. A. Gatherer and T. H.-Y. Meng. "A lower bound on alignment accuracy and subpixel resolution in lithography" J. Vac. Sci. Technolog. B9 (6), pp. 3601-3605, 1991.
3. A. Shchemelinin, E. Shifrin and A. Zaslavsky, "Basic challenges for correlation based overlay measurements", these proceedings.
4. F. Natterer. The mathematics of computerized tomography, Chapter 3.1, Teubner, Stuttgart, 1986.
5. S. C. Douglas, "A frequency-domain subpixel estimation algorithm for overlay measurement," Integrated Circuit Metrology, Inspection, and Process control VII SPIE 1926, pp. 402-411, 1993.