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Physical Review A

Volumn 42, Issue 4, 1990, Pages 2299-2312

Dynamic model of the electrode sheaths in symmetrically driven rf discharges

(2) Godyak, Valery A a Sternberg, Natalia b

a VERIZON (United States)

b CLARK UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001027394 PISSN: 10502947 EISSN: None Source Type: Journal
DOI: 10.1103/PhysRevA.42.2299 Document Type: Article

Times cited : (255)

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