Bimorph-Type Optical Actuator Using PLZT Elements (Position Control of Optical Actuator by On-Off Control)

JSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing

Volumn 41, Issue 4, 1998, Pages 860-866

  Morikawa, Yasushi ^a   Nakada, Takeshi ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b TOKYO DENKI UNIVERSITY   (Japan)

Author keywords

Actuator; Measurement and Control; On Off Control; Optical Actuator; Optical Servo System; Piezo Element; PLZT Element; Position Control

Indexed keywords

EID: 0001023750     PISSN: 13447653     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmec.41.860     Document Type: Article

References (5)

1. Nakada, T., Cao, D.H., Hsien, C.Y., Yamauchi, Y. and Yamauchi, T., Study on Optical Servo System (Contribution to Optical Actuator), Trans. Jpn. Soc. Mech. Eng., (in Japanese), Vol. 57, No. 542, C (1991), p. 3228-3233.
2. Nakada, T., Cao, D.H., Kimura, M. and Hsien, C.Y., Study on Optical Servo System (Modeling for Photovoltaic Effect in PLZT Element), Trans. Jpn. Soc. Mech. Eng., (in Japanese), Vol. 58, No. 552, C (1992), p. 2513-2518.
3. Nakada, T., Cao, D.H., Morikawa, Y., Kimura, M. and Hsien, C.Y., Study on Optical Servo System (Estimation of Dynamic Characteristics of Bimorph-Type Optical Actuator Using PLZT Elements), Trans. Jpn. Soc. Mech. Eng., (in Japanese), Vol. 59, No. 564, C (1993). p. 2470-2476.
4. Hattori, S., Fukuda, T., Maruhashi, T. and Nagamori, S., Introducing a Photoresponse Model of an Optical Microgripper and its Servo System, Trans. Jpn. Soc. Mech. Eng., (in Japanese), Vol. 59, No. 563, C (1993), p. 2177-2184.
5. Fukuda, T., Nakamura, H., Hattori, S., Arai, F. and Matsuura, H., Optical Servo System Using Bimorph PLZT, Trans. Jpn. Soc. Mech. Eng., (in Japanese), Vol. 61, No. 586, C (1995), p. 2448-2454.