Study of sample thickness dependence in electron-beam irradiation of self-developing inorganic materials

Journal of Applied Physics

Volumn 85, Issue 1, 1999, Pages 148-152

  Chen, G S ^a   Humphreys, C J ^b  

^a FENG CHIA UNIVERSITY   (Taiwan)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001017131     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369461     Document Type: Article

References (17)

1. A. Muray, M. Isaacson, and I. Adesida, Appl. Phys. Lett. 45, 589 (1984).
2. A. Muray, M. Scheinfein, and M. Isaacson, J. Vac. Sci. Technol. B 3, 367 (1985).
3. G. S. Chen, C. B. Boothroyd, and C. J. Humphreys, Appl. Phys. Lett. 62, 1949 (1993).
4. S. D. Berger, I. G. Salisbury, R. H. Milne, D. Imeson, and C. J. Humphreys, Philos. Mag. B 55, 341 (1987).
5. I. G. Salisbury, R. S. Timsit, S. D. Berger, and C. J. Humphreys, Appl. Phys. Lett. 45, 1289 (1984).
6. R. M. Allen, Ph.D. thesis, University of Cambridge, 1992.
7. P. S. Turner, T. J. Bullough, R. W. Devenish, D. M. Maher, and C. J. Humphreys, Philos. Mag. Lett. 61, 181 (1990).
8. R. Zanetti, A. L. Bleloch, M. P. Grimshaw, and G. A. C. Jones, Philos. Mag. Lett. 65, 285 (1994).
9. C. J. Morgan and C. J. Humphreys, Inst. Phys. Conf. Ser. 147, 575 (1995).
10. C. J. Humphreys, T. J. Bullough, R. W. Devenish, D. M. Maher, and P. S. Turner, Scanning Microsc. 4, 185 (1990).
11. S. J. R. Granleese, Y. Ito, and L. M. Brown, Inst. Phys. Conf. Ser. 138, 111 (1993).
12. G. S. Chen and C. J. Humphreys, J. Vac. Sci. Technol. B 15, 1954 (1997).
13. S. D. Berger, D. Imeson, and R. H. Milne, Ultramicroscopy 21, 293 (1987).
14. G. S. Chen, C. B. Boothroyd, and C. J. Humphreys, Philos. Mag. A 78, 491 (1998).
15. S. D. Berger, J. M. Macaulay, and L. M. Brown, Philos. Mag. Lett. 56, 179 (1987).
16. J. M. Macaulay, Ph.D. thesis, University of Cambridge, 1989.
17. V. I. Nikolaichik, Philos. Mag. A 68, 227 (1993).