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Plasma Chemistry and Plasma Processing

Volumn 8, Issue 3, 1988, Pages 263-280

Gas-phase reactions in plasmas of SF6 with O2 in He

(2) Ryan, K R a Plumb, I C a

a CSIRO INDUSTRIAL PHYSICS (Australia)

Author keywords

discharge chemistry of SF6 with O2; gas phase reactions; mass spectrometer sampling; Microwave plasma

Indexed keywords

EID: 0001004186 PISSN: 02724324 EISSN: 15728986 Source Type: Journal
DOI: 10.1007/BF01020406 Document Type: Article

Times cited : (68)

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