SCOPUS 정보 검색 플랫폼

Volumn 68, Issue 10, 1990, Pages 5212-5221

Spatial profiling of electron traps in silicon nitride thin films

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001003671 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.347064 Document Type: Article

Times cited : (35)

References (24)

1
- 84950913435
- See, for example, Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Filmsedited by V. J. Kapoor and K. T. Handkins [ ], and references therein.
- (1986) Electrochem. Soc. , vol.87‐10

3
- 84950764640
- See, for example, Proceedings of the 12th International Conference on Amorphous and Liquid Semiconductorsedited by M. Matyas, J. Kocka, and B. Velicky [ ], and references therein.
- (1987) J. Non‐Cryst. Solids , vol.97&98

5
- 36749106007
- (1975) Appl. Phys. Lett. , vol.26 , pp. 94
- Arnett, P.C.¹ Yun, B.H.²

8
- 0015145303
- (1971) J. Appl. Phys. , vol.42 , pp. 4390
- Powell, R.J.¹ Berglund, C.N.²

11
- 0021477868
- (1984) J. Appl. Phys. , vol.56 , pp. 1070
- Bibyk, S.B.¹ Kapoor, V.J.²

12
- 0016962589
- (1976) J. Appl. Phys. , vol.47 , pp. 2763
- Lehovec, K.¹ Grain, D.W.²

15
- 0003679027
- (McGraw‐Hill, New York)
- (1983) VLSI Technology , pp. 121
- Sze, S.M.¹

17
- 0018062167
- edited by S. T. Pantelides (Pergamon, New York), p. and references therein.
- (1978) The Physics of [Formula Omitted] and Its Interfaces , pp. 160
- DiMaria, D.J.¹

18
- 26844498337
- (1981) Appl. Phys. Lett. , vol.51 , pp. 1702
- Severi, M.¹ Impronta, M.²

21
- 22244435120
- See, for example, in, edited by J. Pankove (Academic, Orlando), Vol. C, p. and references therein.
- (1984) Hydrogenated Amorphous Silicon , vol.21 , pp. 207
- Tiedje, T.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.