Nondestructive depth profiling in Auger electron spectroscopy by means of partial intensity analysis

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 465-469

  Werner, Wolfgang S M ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000985055     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580875     Document Type: Article

References (16)

1. T. P. Bussing and P. H. Holloway, J. Vac. Sci. Technol. A 3, 1973 (1985).
2. J. Tyler, D. G. Castner and B. D. Ratner, Surf. Interface Anal. 14, 443 (1989).
3. W. A. M. Aarnink, A. Weishaupt, and A. van Silfhout, Appl. Surf. Sci. 45, 37 (1990).
4. W. H. Gries, J. Vac. Sci. Technol. A 7, 1655 (1989).
5. G. C. Smith ad A. K. Livesey, Surf. Interface Anal. 19, 222 (1992).
6. H. Ebel, M. F. Ebel, H. Fischer, B. Schoßmann, and R. Svagera, Surf. Interface Anal. 21, 490 (1994).
7. V. I. Nefedov and O. A. Baschenko, J. Electron Spectrosc. Relat. Phenom. 47, 1 (1988).
8. S. Tougaard and H. S. Hansen, Surf. Interface Anal. 14, 730 (1989).
9. S. Tougaard, Surf. Interface Anal. 8, 257 (1986).
10. W. S. M. Werner, Surf. Interface Anal. 23, 737 (1995).
11. NAGLIB, Numerical Algorithm Group, Oxford University.
12. I. S. Tilinin, A. Jablonski, and W. S. M. Werner, Prog. Surf. Sci. 52, 193 (1996).
13. H. Wagner, C. Schiebl, and W. S. M. Microchim. Acta 13, 623 (1996).
14. W. S. M. Werner, J. Vac. Sci. Technol. (these proceedings).
15. P. Cumpson, J. Electron Spectrosc. Relat. Phenom. 73, 25 (1995).
16. I. S. Tilinin and W. S. M. Werner, Surf. Sci. 290, 1119 (1993).