The role of the latent image in a new dual image, aqueous developable, thermally stable photoresist

Polymer Engineering & Science

Volumn 26, Issue 16, 1986, Pages 1101-1104

  Feely, Wayne E ^a   Imhof, Joann C ^a   Stein, Cynthia M ^a  

^a ROHM AND HAAS COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000934974     PISSN: 00323888     EISSN: 15482634     Source Type: Journal    
DOI: 10.1002/pen.760261605     Document Type: Article

References (10)