Paradoxical spatial distribution of the electron temperature in a low pressure rf discharge

Applied Physics Letters

Volumn 63, Issue 23, 1993, Pages 3137-3139

  Godyak, V A ^a   Piejak, R B ^a  

^a OSRAM SYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000915643     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.110227     Document Type: Article

References (15)