Debris-reduced laser machining of polymeric waveguides for optoelectronic applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4274, Issue , 2001, Pages 432-441

  Berden, Thomas ^a   Kreutz, Ernst Wolfgang ^a   Poprawe, Reinhart ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Absorption losses; Debris; Excimer; Micromachining; Optoelectronic; Polymers; Waveguides

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEBRIS; ELECTRIC LOSSES; EXCIMER LASERS; LIGHT TRANSMISSION; MANUFACTURE; MICROELECTRONICS; MICROMACHINING; OPTICAL MULTILAYERS; OPTICAL WAVEGUIDES; POLYMERS; SURFACE ROUGHNESS; WAVEGUIDES;

ABSORPTION LOSS; EXCIMERS; KRF EXCIMER LASER; OPTOELECTRONIC; OPTOELECTRONIC APPLICATIONS; POLYMER MULTILAYERS; POLYMERIC WAVEGUIDE; WHITE-LIGHT INTERFEROMETRY;

PULSED LASERS;

EID: 0000909099     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.432537     Document Type: Conference Paper

References (6)

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