Thermally driven micromechanical bridge resonators

Sensors and Actuators: A. Physical

Volumn 42, Issue 1-3, 1994, Pages 680-684

  Burrer, Chr ^a   Esteve, J ^a  

^a CSIC   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000901941     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(94)80074-X     Document Type: Article

References (9)

1. A thermally-excited silicon accelerometer
2. A vibrating quartz force sensor
3. Resonator sensors — a review
4. Study of electrochemical etch-stop for high-precision thickness control of silicon membranes
5. Resonating microbridge mass flow sensor
6. Effect of optical power on the resonance frequency of optically powered silicon microresonators
7. Performance of thermally excited resonators
8. Electrical cross-talk in two-port resonators — the resonant silicon beam force sensor
9. Heterodyn-Interferometer zur Vibrationsanalyse