Direct laser ablation of sub-100 nm line structures into polyimide

Applied Physics A Solids and Surfaces

Volumn 54, Issue 2, 1992, Pages 158-165

  Phillips, H M ^a   Callahan, D L ^a   Sauerbrey, R ^a   Szabo, G ^b   Bor, Z ^b  

^a RICE UNIVERSITY   (United States)

^b UNIVERSITY OF SZEGED   (Hungary)

Author keywords

07.60.Ly; 81.60.Jw

Indexed keywords

EID: 0000890418     PISSN: 07217250     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/BF00323903     Document Type: Article

References (13)

1. First order distributed feedback gratings (92.5–105 nm period) for GaInP/AlGaInP lasers emitting in the visible range
2. A review of excimer laser projection lithography
3. Stimulated Wood's anomalies on laser-illuminated surfaces
4. Periodic surface structures in the excimer laser ablative etching of polymers