320 x 240 Pixels Quantum Well Infrared Photodetector (QWIP) array for thermal imaging: Fabrication and evaluation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3061, Issue , 1997, Pages 740-748

  Andersson, Jan Y ^a   Alverbro, Jorgen ^a   Borglind, Jan ^a   Helander, Per O ^a   Martijn, Henk H ^a   Östlund, Mikko ^a  

^a ACREO AB   (Sweden)

Author keywords

320x240; Array; Infrared detector; QWIP

Indexed keywords

DETECTORS; FABRICATION; FLIP CHIP DEVICES; INFRARED DETECTORS; INFRARED RADIATION; OPTOELECTRONIC DEVICES; PHOTODETECTORS; PIXELS; SEMICONDUCTING GALLIUM;

320X240; ABSORPTANCE; ALGAAS/GAAS; ARRAY; CHIP BONDINGS; HIGH RESOLUTIONS; IMAGE PERFORMANCES; INDIUM BUMPS; LARGE ARRAYS; LOW COSTS; N-DOPED; NETD (NOISE EQUIVALENT TEMPERATURE DIFFERENCE); OPERATING TEMPERATURES; OPTICAL COUPLINGS; OPTICAL-; PATTERN NOISES; PROCESSING TECHNOLOGIES; QWIP; READOUT CHIPS; RESPONSIVITY; STIRLING COOLERS; SUBSTRATE REMOVALS; SUBSTRATE THINNING; TEMPERATURE RESOLUTIONS; THERMAL MISMATCHES; WAFER UNIFORMITIES;

GALLIUM ALLOYS;

EID: 0000887510     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.280392     Document Type: Conference Paper

References (9)

1. J. Y. Andersson, L. Lundqvist, and Z. F. Paska, "Quantum efficiency enhancement of AlGaAs/GaAs quantum well infrared detectors using a waveguide with a grating coupler", Appl. Phys. Lett. 58, pp. 2264-2266, 1991.
2. J. Y. Andersson and L. Lundqvist, "Near-unity quantum efficiency of AlGaAs/GaAs quantum well infrared detectors using a waveguide with a doubly periodic grating coupler", Appl. Phys. Lett. 59, pp. 857-859, 1991.
3. J. Y. Andersson and L. Lundqvist, "Grating-coupled quantum-well infrared detectors: Theory and performance", J. Appl. Phys. 71, pp. 3600-3610, 1992.
4. L. Lundqvist, J. Y. Andersson, Z. F. Paska, J. Borglind, and D. Haga, "Efficiency of grating coupled AlGaAs/GaAs quantum well infrared detectors", Appl. Phys. Lett. 63, pp. 3361-3363, 1993.
5. J. Y. Andersson and L. Lundqvist, "Grating coupled quantum well detectors", in Long Wavelength Infrared Detectors, Vol. 1, Ed. M. Razeghi, part of the series Optoelectronic Properties of Semiconductors and Superlattices, Series Editor M. O. Manasreh, Gordon and Breach Science Publishers, ISBN 2-88449-208-9, pp. 207-270, 1996.
6. J. Y. Andersson, "Dark current mechanisms and conditions of background radiation limitation of n-doped AlGaAs/GaAs quantum-well infrared detectors", J. Appl. Phys. 78, pp. 6298-6304, 1993.
7. B. F. Levine, "Quantum-well infrared photodetectors", J. Appl. Phys. 74, pp. R1-R81, 1993.
8. W. A. Beck, T. S. Faska, J. W. Little, and A. C. Goldberg, "256x256 focal plane arrays using miniband transport multiple quantum well infrared photodetectors", Proc. of the Third International Symposium on Long Wavelength Infrared Detectors and Arrays: Physics and Applications III, Electrochemical Society Meeting, pp. 7-14, 1995.
9. G. Sarusi, S. D. Gunapala, J. S. Park, J. K. Liu, T. L. Lin, P. D. Maker, R. E. Muller, and B. F. Levine, "15 μm cut-off 128 x 128 quantum well infrared photodetectors (QWIPs) camera", Proceedings of the SPIE, Infrared Technology XXI, Vol. 2552, pp. 467-475, 1995.