High temperature stability of chromium boride ohmic contacts to p-type 6H-SiC

Journal of Electronic Materials

Volumn 27, Issue 4, 1998, Pages 324-329

  Oder, T N ^a   Williams, J R ^a   Bozack, M J ^a   Iyer, V ^b   Mohney, S E ^b   Crofton, J ^c  

^a AUBURN UNIVERSITY   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

^c MURRAY STATE UNIVERSITY   (United States)

Author keywords

Chromium boride; Ohmic contact; Rutherford backscattering spectrometry (RBS); Specific contact resistance; Transmission electron microscopy (TEM); X ray photoelectron spectroscopy (XPS)

Indexed keywords

EID: 0000879949     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-998-0409-4     Document Type: Article

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