Thermal-mechanical performance of extreme ultraviolet lithographic reticles

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3440-3443

  Gianoulakis, Steven E ^a   Ray Chaudhuri, Avijit K ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000869655     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590474     Document Type: Article

References (2)

1. D. K. Gartling and R. E. Hogan, "COYOTE II - A Finite Element Computer Program for Non-Linear Heat Conduction Problems," SAND94-1197, April 1998.
2. M. L. Blanford, "JAS3D - A Multi-Strategy Iterative Code for Solid Mechanics Analysis," Internal Sandia Memorandum, December 15, 1997.