Effect of annealing conditions on the uniformity of undoped semi-insulating InP

Journal of Electronic Materials

Volumn 25, Issue 3, 1996, Pages 353-356

  Kainosho, K ^a   Ohta, M ^a   Uchida, M ^a   Nakamura, M ^a   Oda, O ^a  

^a JAPAN ENERGY CORPORATION   (Japan)

Author keywords

Annealing; Bulk InP; Semi insulating

Indexed keywords

EID: 0000862206     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02666601     Document Type: Article

References (14)

1. D.E. Holms, R.G. Wilson and P.W. Yu, J. Appl. Phys. 52, 3396 (1981).
2. C. Blaauw, B. Emmerstorfer, R.A. Bruce and M. Benzaquen, Proc. 6th Conf. on Semi-insulating III-V Materials, Toronto, 1990 (IOP, 1990), p. 137.
3. C. Miner, D.G. Knight, J.M. Zorzi, R.W. Streater, N. Puetz and M. Ikisawa, Inst. Phys. Conf. Ser. No. 135 Proc. DRIP VI, Santander, 1993, (1994), p. 181.
4. D. Hofmann, G. Müller and N. Streckfuß, Appl. Phys. A 48, 315 (1989).
5. K. Kainosho, H. Shimakura, H. Yamamoto, and O. Oda, Appl. Phys. Lett. 59, 932 (1991).
6. G.W. Iseler, Inst. Phys. Conf. Ser. No. 45, 144 (1979).
7. K. Korona, K. Karpinska, A. Babinski and A. M. Hennel, Acta Phys. Pol. A 55, 71 (1990).
8. G. Hirt, S. Bornhorst, J. Friedrich, N. Schäfer and G. Müller, Proc. 5th Intl. Conf. on InP and Related Materials (Paris, 1993), p. 313.
9. G. Hirt, T. Mono and G. Müller, Mater. Sci. Eng. B 28, 101 (1994).
10. O. Mizuno and H. Watanabe, Electron. Lett. 11, 118 (1975).
11. K. Kainosho, O. Oda, G. Hirt and G. Müller, Mater. Res. Soc. Symp. Proc. 325, 101 (1994).
12. K. Kainosho, H. Okazaki and O. Oda, Post Deadline Papers 5th Intl. Conf. on InP and Related Materials (Paris, 1993), p. 33.
13. D. Wolf, G. Hirt and G. Müller, J. Electron. Mater. 2 4, 93 (1996).
14. T. Kikuta, H. Emori, T. Fukuda and K. Ishida, J. Cryst. Growth 76, 517 (1986).