Formation of epitaxial CoSi2 spike in Co/Si3N4/Si(100) system and its crystallographic structure

Applied Physics Letters

Volumn 73, Issue 16, 1998, Pages 2284-2286

  Park, Ji Soo ^a   Sohn, Dong Kyun ^a   Kim, Yeongcheol ^a   Bae, Jong Uk ^a   Lee, Byung Hak ^a   Byun, Jeong Soo ^a   Kim, Jae Jeong ^a  

^a Hynix Semiconductor Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000854681     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121703     Document Type: Article

References (15)

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