Investigation of nanoscale Ge segregation in p-channel SiGe/Si field effect transistor structures by electron energy loss imaging

Journal of Applied Physics

Volumn 86, Issue 12, 1999, Pages 7183-7185

  Norris, D J ^a   Cullis, A G ^a   Grasby, T J ^b   Parker, E H C ^b  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

^b UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000854450     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371810     Document Type: Article

References (20)

1. E. H. C. Parker and T. E. Whall, Solid State Electron. (in press).
2. T. E. Whall and E. H. C. Parker, Thin Solid Films (in press).
3. T. E. Whall and E. H. C. Parker, J. Phys. D: Appl. Phys. 31, 1397 (1998).
4. A. G. Cullis, D. J. Robbins, A. J. Pidduck, and P. W. Smith, J. Cryst. Growth 123, 333 (1992).
5. T. J. Grasby et al., Appl. Phys. Lett. 74, 1848 (1999).
6. G. G. Jernigan, P. E. Thompson, and C. L. Silvestre, Surf. Sci. 380, 417 (1997).
7. W. Jager and J. Mayer, Ultramicroscopy 59, 33 (1995).
8. T. Walther, C. J. Humphreys, A. G. Cullis, and D. J. Robbins, Mater. Sci. Forum 196-201, 505 (1995).
9. T. Walther, C. J. Humphreys, A. G. Cullis, and D. J. Robbins, in Microscopy of Semiconducting Materials 1997, edited by A. G. Cullis and J. L. Hutchison (Institute of Physics Publishing, Bristol, 1997), pp. 47-54.
10. T. Walther and C. J. Humphreys, J. Cryst. Growth 197, 113 (1999).
11. O. L. Krivenec, M. Kundmann, and X. Bourrat, Mater. Res. Soc. Symp. Proc. 332, 341 (1994).
12. O. L. Krivenec, M. K. Kundmann, and K. Kimoto, J. Microsc. 180, 277 (1995).
13. R. F. Egerton and P. A. Crozier, Micron 28, 117 (1997).
14. C.-P. Liu, Ph.D. Thesis, Cambridge, UK, 1998, Chap. 4.
15. D. J. Norris, A. G. Cullis, T. J. Grasby, E. H. C. Parker, and T. E. Whall (unpublished).
16. O. Dehaese, X. Wallart, and F. Mollot, Appl. Phys. Lett. 66, 52 (1995).
17. S. Fukatsu, K. Fujita, H. Yaguchi, Y. Shiraki, and R. Ito, Appl. Phys. Lett. 59, 2103 (1991).
18. H. Jorke, Surf. Sci. 193, 569 (1998).
19. Y. Li, G. G. Hembree, and J. A. Venables, Appl. Phys. Lett. 67, 276 (1995).
20. D. J. Norris, A. G. Cullis, M. G. Dowsett, and E. H. C. Parker (unpublished).