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Volumn 97-98, Issue PART 2, 1987, Pages 1455-1458
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Fluorinated amorphous silicon-germanium alloys deposited from disilane-germane mixture
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0000849103
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/0022-3093(87)90349-8 Document Type: Article |
Times cited : (61)
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References (6)
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