Enhanced elimination of implantation damage upon exceeding the solid solubility

Journal of Applied Physics

Volumn 62, Issue 10, 1987, Pages 4114-4117

  Jones, Kevin S ^a   Prussin, S ^a   Weber, E R ^a  

^a UNIVERSITY OF FLORIDA   (United States)

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Indexed keywords

EID: 0000832883     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.339126     Document Type: Article

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