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Volumn 36, Issue 12, 1997, Pages 2545-2553

Direct measurement of substrate refractive indices and determination of layer indices in slab-guiding structures

Author keywords

Direct refractive index measurements; Grating waveguide; InP; Near band gap semiconductor index; Refractive index temperature coefficients

Indexed keywords


EID: 0000816018     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.002545     Document Type: Article
Times cited : (11)

References (31)
  • 1
    • 0016071759 scopus 로고
    • Jr. and K. W. Wecht, “Concentration dependence of the refractive index for n- and p-type GaAs between 1.2 and 1.8 eV
    • D. D. Sell, H. C. Casey, Jr., and K. W. Wecht, “Concentration dependence of the refractive index for n- and p-type GaAs between 1.2 and 1.8 eV, ” J. Appl. Phys. 45, 2650-2657 (1974).
    • (1974) J. Appl. Phys , vol.45 , pp. 2650-2657
    • Sell, D.D.1    Casey, H.C.2
  • 2
    • 21544435781 scopus 로고
    • Refractive index of GaAs
    • D. T. F. Marple, “Refractive index of GaAs, ” J. Appl. Phys. 35, 1241-1242 (1964).
    • (1964) J. Appl. Phys. , vol.35 , pp. 1241-1242
    • Marple, D.T.F.1
  • 3
    • 0020139884 scopus 로고
    • Index of refraction of n-type InP at 0.633 p.m and 1.15 p.m wavelengths as a function of carrier concentration
    • M. S. Whalen and J. Stone, “Index of refraction of n-type InP at 0.633 p.m and 1.15 p.m wavelengths as a function of carrier concentration, ” J. Appl. Phys. 53, 4340-4343 (1982).
    • (1982) J. Appl. Phys. , vol.53 , pp. 4340-4343
    • Whalen, M.S.1    Stone, J.2
  • 4
    • 0011420343 scopus 로고
    • Precision measurements in thin film optics
    • G. Hass and R. E. Thun, edsAcademic, New York
    • H. E. Bennett and J. M. Bennett, “Precision measurements in thin film optics, ” in Physics of Thin Films, G. Hass and R. E. Thun, eds. (Academic, New York, 1967), Vol. 4, p. 77.
    • (1967) Physics of Thin Films , vol.4 , pp. 77
    • Bennett, H.E.1    Bennett, J.M.2
  • 5
    • 0019529986 scopus 로고
    • Optical reflectance:A sensitive nondestructive method for detecting surface damage in crystalline GaAs and other semiconductors
    • P. J. Zanzucchi and W. R. Frenchu, “Optical reflectance: a sensitive nondestructive method for detecting surface damage in crystalline GaAs and other semiconductors, ” Appl. Opt. 20, 643-646 (1981).
    • (1981) Appl. Opt. , vol.20 , pp. 643-646
    • Zanzucchi, P.J.1    Frenchu, W.R.2
  • 6
    • 0040774110 scopus 로고
    • Optical studies of the band structure of InP
    • M. Cardona, “Optical studies of the band structure of InP, ” J. Appl. Phys. 32, 958 (1961).
    • (1961) J. Appl. Phys. , vol.32 , pp. 958
    • Cardona, M.1
  • 8
    • 5544247070 scopus 로고
    • Index of refraction dispersion of n-andp-type InP between 0.95 and 2.0 eV
    • J. Stone and M. S. Whalen, “Index of refraction dispersion of n-andp-type InP between 0.95 and 2.0 eV, ” Appl. Phys. Lett. 41, 1140-1142 (1982).
    • (1982) Appl. Phys. Lett. , vol.41 , pp. 1140-1142
    • Stone, J.1    Whalen, M.S.2
  • 9
    • 0028467279 scopus 로고
    • Optimisation de dispositifs en guide donde avec coupleur à réseau: Application aux commutateurs optiques
    • F. Bertrand, N. Paraire, P. Dansas, and N. Moresmau, “Optimisation de dispositifs en guide d’onde avec coupleur à réseau: application aux commutateurs optiques, ” J. Phys. III France 4, 1321-1334 (1994).
    • (1994) J. Phys. Iiifrance , vol.4 , pp. 1321-1334
    • Bertrand, F.1    Paraire, N.2    Dansas, P.3    Moresmau, N.4
  • 11
    • 0014505306 scopus 로고
    • Modes of propagatinglight waves in thin deposited semiconductor films
    • P. K. Tien, R. Ulrich, and R. J. Martin, “Modes of propagating light waves in thin deposited semiconductor films, ” Appl. Phys. Lett. 14, 291-294 (1969).
    • (1969) Appl. Phys. Lett. , vol.14 , pp. 291-294
    • Tien, P.K.1    Ulrich, R.2    Martin, R.J.3
  • 12
    • 5844251687 scopus 로고
    • Measurement of the effective refractive indices of InGaAsP waveguides by silicon prism coupler
    • H. J. Lee, “Measurement of the effective refractive indices of InGaAsP waveguides by silicon prism coupler, ” J. Korean Phys. Soc. 22, 487-490 (1989).
    • (1989) J. Korean Phys. Soc. , vol.22 , pp. 487-490
    • Lee, H.J.1
  • 13
    • 0016483923 scopus 로고
    • A new method for measuring refractive index and thickness of liquid and deposited solid films
    • R. Th. Kersten, “A new method for measuring refractive index and thickness of liquid and deposited solid films, ” Opt. Commun. 13, 327-329 (1975).
    • (1975) Opt. Commun. , vol.13 , pp. 327-329
    • Kersten, R.T.1
  • 15
    • 0029357993 scopus 로고
    • Accurate refractive index measurements of doped and undoped InP by a grating coupler technique
    • P. Martin, E. Skouri, L. Chusseau, C. Alibert, and H. Bisses-sur, “Accurate refractive index measurements of doped and undoped InP by a grating coupler technique, ” Appl. Phys. Lett. 67, 881-883 (1995).
    • (1995) Appl. Phys. Lett. , vol.67 , pp. 881-883
    • Martin, P.1    Skouri, E.2    Chusseau, L.3    Alibert, C.4    Bisses-Sur, H.5
  • 16
    • 84975641274 scopus 로고
    • Direct measurement of the effective refractive indices of GaAs/AlGaAs slab waveguides:Anewtechnique
    • K. H. Chiang, C. J. Summers, and R. P. Kenan, “Direct measurement of the effective refractive indices of GaAs/AlGaAs slab waveguides: a new technique, ” Appl. Opt. 30, 2570-2574 (1991).
    • (1991) Appl. Opt. , vol.30 , pp. 2570-2574
    • Chiang, K.H.1    Summers, C.J.2    Kenan, R.P.3
  • 17
    • 0015752050 scopus 로고
    • Measurement of thin film parameters with a prism coupler
    • R. Ulrich and R. Torge, “Measurement of thin film parameters with a prism coupler, ” Appl. Opt. 12, 2901-2908 (1973).
    • (1973) Appl. Opt. , vol.12 , pp. 2901-2908
    • Ulrich, R.1    Torge, R.2
  • 18
    • 0016891860 scopus 로고
    • Optical waveguide refractive index profiles determined from measurement of mode indices: A simple analysis
    • J. M. White and P. F. Heidrich, “Optical waveguide refractive index profiles determined from measurement of mode indices: a simple analysis, ” Appl. Opt. 15, 151-155 (1976).
    • (1976) Appl. Opt. , vol.15 , pp. 151-155
    • White, J.M.1    Heidrich, P.F.2
  • 19
    • 0022957488 scopus 로고
    • Computer aided measurement techniques for integrated optics devices
    • R. Th. Kersten, ed., Proc. SPIE
    • H. F. Schlaak, G. Sulz, Y. L. Zhan, and A. Brandenburg, “Computer aided measurement techniques for integrated optics devices, ” in Integrated Optical Circuit Engineering III, R. Th. Kersten, ed., Proc. SPIE 651, 240-245 (1986).
    • (1986) Integrated Optical Circuit Engineering III , vol.651 , pp. 240-245
    • Schlaak, H.F.1    Sulz, G.2    Zhan, Y.L.3    Brandenburg, A.4
  • 20
    • 0025384244 scopus 로고
    • Techniques for refractive index measurements on semiconductor waveguides:Prism coupling and modal cut-off spectroscopy
    • C. De Bernardi, M. Meliga, S. Morasca, and B. Sordo, “Techniques for refractive index measurements on semiconductor waveguides: prism coupling and modal cut-off spectroscopy, ” Centro Studi e Laboratori Telecomunicazioni Tech. Rep. 18, 65-67 (1990).
    • (1990) Centro Studi E Laboratori Telecomunicazioni Tech. Rep. , vol.18 , pp. 65-67
    • De Bernardi, C.1    Meliga, M.2    Morasca, S.3    Sordo, B.4
  • 22
    • 5844245536 scopus 로고
    • France-Teiecom n °92.6B.032, Intermediate report (Industrial Propietary, June
    • N. Paraire, “Etude d’un système flip-flop optique monolithique, ” Marche France-Teiecom n °92.6B.032, Intermediate report (Industrial Propietary, June 1994).
    • (1994) Etude Dun système Flip-Flop Optique monolithique
    • Paraire, N.1
  • 23
    • 5844282751 scopus 로고
    • Sensitivity and switching contrast optimization in an optical signal processing waveguide structure
    • S. D. Smith and R. F. Neale, eds, SpringerVerlag, Berlin
    • N. Paraire, P. Dansas, A. Koster, M. Rousseau, and S. Laval, “Sensitivity and switching contrast optimization in an optical signal processing waveguide structure, ” in Optical Information Technology, S. D. Smith and R. F. Neale, eds. (SpringerVerlag, Berlin, 1993), pp. 350-357.
    • (1993) Optical Information Technology , pp. 350-357
    • Paraire, N.1    Dansas, P.2    Koster, A.3    Rousseau, M.4    Laval, S.5
  • 24
    • 84916421507 scopus 로고
    • Optical constants of III-V compounds
    • K. Willardson and A. C. Beer, eds, Academic, New York
    • B. O. Seraphin and H. E. Bennett, “Optical constants of III-V compounds, ” in Semiconductors and semimetals, Vol. 3: Optical Properties of III-V Compounds, R. K. Willardson and A. C. Beer, eds. (Academic, New York, 1967), p. 530.
    • (1967) Semiconductors and Semimetals , pp. 530
    • Seraphin, B.O.1    Bennett, H.E.2
  • 25
    • 0042615803 scopus 로고
    • Refractive index of InP
    • G. D. Pettit and W. J. Turner, “Refractive index of InP, ” J. Appl. Phys. 36, 2081 (1965).
    • (1965) J. Appl. Phys. , vol.36 , pp. 2081
    • Pettit, G.D.1    Turner, W.J.2
  • 26
    • 0012080529 scopus 로고
    • Optical properties of In1-rGa:RAsyP1_y alloys
    • S. Adachi, “Optical properties of In alloys, ” Phys. Rev. B 39, 12, 612-12, 621 (1989).
    • (1989) Phys. Rev. B , pp. 621
    • Adachi, S.1
  • 27
    • 0012659068 scopus 로고
    • High precision temperature-and energy-dependent refractive index of GaAs determined from excitation of optical waveguide eigenmodes
    • S. R. Kisting, P. W. Bohn, E. Andideh, I. Adesida, B. T. Cunningham, and G. E. Stillman, “High precision temperature-and energy-dependent refractive index of GaAs determined from excitation of optical waveguide eigenmodes, ” Appl. Phys. Lett. 57, 1328-1330 (1990).
    • (1990) Appl. Phys. Lett. , vol.57 , pp. 1328-1330
    • Kisting, S.R.1    Bohn, P.W.2    Andideh, E.3    Adesida, I.4    Cunningham, B.T.5    Stillman, G.E.6
  • 28
    • 4243131625 scopus 로고
    • Fast modelling of light beam diffraction by multilayer structures including a grating coupler
    • P. Dansas, N. Paraire, and F. Lederer, “Fast modelling of light beam diffraction by multilayer structures including a grating coupler, ” Pure Appl. Opt. 4, 139-160 (1995).
    • (1995) Pure Appl. Opt. , vol.4 , pp. 139-160
    • Dansas, P.1    Paraire, N.2    Lederer, F.3
  • 30
    • 0015404010 scopus 로고
    • Thermal expansion of InGa-P alloys
    • J. Judman and R. J. Pfaff, “Thermal expansion of InGa-P alloys, ” J. Appl. Phys. 43, 3760-3762 (1972).
    • (1972) J. Appl. Phys. , vol.43 , pp. 3760-3762
    • Judman, J.1    Pfaff, R.J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.