The determination of the current-voltage characteristics of a closed-field unbalanced magnetron sputtering system

Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 1370-1376

  Kelly, P J ^a   Arnell, R D ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

Current voltage characteristics; Sputtering; Unbalanced magnetron sputtering

Indexed keywords

EID: 0000813301     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00260-0     Document Type: Article

References (17)

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