Quantitative two-dimensional dopant profiles obtained directly from secondary electron images

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 421-425

  Venables, D ^a   Maher, D M ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000791905     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588486     Document Type: Article

References (7)

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3. D. D. Perovic, M. R. Castell, A. Howie, C. Lavoie, T. Tiedje, and J. S. W. Cole, in Proceedings of the 13th International Congress on Electron Microscopy (Les Editions de Physique, Paris, 1994), Vol. 1, p. 91.
4. D. D. Perovic, M. R. Castell, A. Howie, C. Lavoie, T. Tiedje, and J. S. W. Cole, Ultramicroscopy 58, 104 (1995).
5. B. Zhang, M. S. thesis, North Carolina State University, 1992.
6. D. C. Joy (private communication).
7. M. Sato, O. Takaoka, H. Todokoro, R. Tamochi, T. Suzuki, M. Goto, and Y. Ose, in Proceedings of the 13th International Congress on Electron Microscopy (Les Editions de Physique, Paris, 1994), Vol. 1, p. 83.