Scanning tunneling microscopy of Si/SiO2 interface roughness and its dependence on growth conditions

Applied Physics Letters

Volumn 68, Issue 1, 1996, Pages 114-116

  Shekhawat, G S ^a   Gupta, Ram P ^a   Shekhawat, S S ^a   Runthala, D P ^a   Vyas, P D ^a   Srivastava, P ^b   Venkatesh, S ^b   Mamhoud, K ^b   Garg, K B ^b  

^a CENTRAL ELECTRONICS ENGINEERING RESEARCH INSTITUTE   (India)

^b UNIVERSITY OF RAJASTHAN   (India)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000791108     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116774     Document Type: Article

References (13)

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