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Volumn 365, Issue 1-3, 1999, Pages 199-202
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Characterization of transition metal nitride formation in Rapid Thermal Processing (RTP)
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0000790944
PISSN: 09370633
EISSN: None
Source Type: Journal
DOI: 10.1007/s002160051472 Document Type: Article |
Times cited : (12)
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References (13)
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