Low-energy ion-scattering spectrometry (ISS) of the SiO2/Si interface

Applied Physics Letters

Volumn 27, Issue 12, 1975, Pages 644-645

  Harrington, William L ^a   Honig, Richard E ^a   Goodman, Alvin M ^a   Williams, Richard ^a  

^a SARNOFF CORPORATION   (United States)

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[No Author keywords available]

Indexed keywords

EID: 0000781302     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.88345     Document Type: Article

References (10)