Polarization modulated transmission spectro-ellipsometry

Review of Scientific Instruments

Volumn 67, Issue 5, 1996, Pages 1951-1955

  Fukazawa, Tomoyuki ^a   Fujita, Yasuhiko ^b  

^a Hachioji shi   (Japan)

^b TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000768157     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1146949     Document Type: Article

References (10)

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5. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1987).
6. T. Fukazawa, M. Sano, Y. Yoshida, and N. Sakayanagi, Thin Solid Films 234, 390 (1993).
7. R. A. Chipman, in Handbook of Optics, 2nd ed., edited by M. Bass (McGraw-Hill, New York, 1994), Vol. 1.
8. Rika Nenpyo, Chronological Scientific Tables (National Astronomical Observatory, Maruzen, 1990), p. 522 (in Japanese).
9. Y. Shindo, H. Hayakawa, and M. Sudani, Appl. Spectrosc. 43, 1471 (1989).
10. T. Nakano, T. Yokoyama, and H. Toriumi, Appl. Spectrosc. 47, 1354 (1993).