Microscopic characterization of field emitter array structure and work function by scanning Maxwell-stress microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 3, 1996, Pages 2105-2109

  Itoh, Junji ^a   Nazuka, Yutaro ^a,b   Kanemaru, Seigo ^a   Inoue, Takahito ^a   Yokoyama, Hiroshi ^a   Shimizu, Keizo ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

^b TOKAI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000765129     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588880     Document Type: Article

References (12)

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