A real-time confocal scanning optical microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 809, Issue , 1987, Pages 107-113

  Xiao, G Q ^a   Kino, G S ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGING TECHNIQUES; SCANNING;

CONFOCAL SCANNING; OBJECTIVE LENS; RANGE RESOLUTION; REAL TIME; SYSTEM USE;

MICROSCOPES;

EID: 0000762390     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.941505     Document Type: Conference Paper

References (5)

1. M. Petran, M. Hadravsky, M. D. Egger, and R. Galambos, "Tandem-Scanning Reflected-Light Microscope, " J. Opt. Soc. Amer 58, 661-664 (1968).
2. M. Petran, M. Hadravsky, J. Benes, R. Kucera, and A. Boyde, "The Tandem Scanning Reflected Light Microscope, Part 1: The Principle and Its Design, " Proc. Roy. Microscopical Soc. 20, 125-129 (1985).
3. A. Boyde, "The Tandem Scanning Reflected Light Microscope, Part 2: Pre-Micro '84 Applications at UCL, " Proc. Roy. Microscopical Soc. 20, 131-139 (1985).
4. T. Wilson and C. Shepphard, Theory and Practice of Scanning Optical Microscopy, Academic Press, London (1984).
5. S. D. Bennett, J. D. Lindow, and I. R. Smith, "Integrated Circuit Metrology with Confocal Optical Microscopy, " Phil. Trans. Roy. Soc. London, Series A 320, 307-313 (1986).