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Physical Review Letters

Volumn 71, Issue 6, 1993, Pages 883-886

Boron diffusion in strained Si1-xGex epitaxial layers

(6) Moriya, N a Feldman, L C a Luftman, H S a King, C A a Bevk, J a Freer, B a

a LUCENT TECHNOLOGIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000755647 PISSN: 00319007 EISSN: None Source Type: Journal
DOI: 10.1103/PhysRevLett.71.883 Document Type: Article

Times cited : (116)

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