Relaxed Si1-xGex/Si1-x-yGexCy buffer structures with low threading dislocation density

Applied Physics Letters

Volumn 70, Issue 21, 1997, Pages 2813-2815

  Osten, H J ^a   Bugiel, E ^a  

^a IHP   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000753710     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119067     Document Type: Article

References (13)

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