Focused ion beam induced deposition of platinum for repair processes

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 9, Issue 1, 1991, Pages 162-164

  Tao, Tao ^a   Wilkinson, William ^a   Melngailis, John ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; MILLING (MACHINING); PLATINUM; REPAIR;

ANGLE OF INCIDENCE; FOCUSED ION BEAM INDUCED DEPOSITION; REPAIR PROCESS; TRIMETHYL;

DEPOSITION;

EID: 0000732363     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: None     Document Type: Article

References (0)