New insights on SiGe growth instabilities

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1582-1588

  Berbezier, I ^a   Gallas, B ^b   Lapena, L ^b   Fernandez, J ^a   Derrien, J ^b   Joyce, B ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b CAMPUS DE LUMINY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000712804     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589943     Document Type: Article

References (29)

1. F. K. Le Goues, MRS Bull. 21, 38 (1996).
2. A. G. Cullis, MRS Bull. 21, 21 (1996).
3. G. Springholz and G. Bauer, Phys. Rev. B 48, 10 998 (1993).
4. D. E. Jesson, S. J. Pennycook, J. M. Baribeau, and D. C. Houghton, Phys. Rev. Lett. 71, 1744 (1993).
5. H. Gao, J. Mech. Phys. Solids 42, 741 (1994).
6. M. Albrecht, S. Christiansen, H. P. Strunk, P. O. Hansson, and E. Bauser, Solid State Phenom. 32-33, 433 (1993).
7. R. J. Asaro and W. A. Tiller, Metall. Trans. A 3, 1789 (1972).
8. M. A. Grinfeld, J. Intell. Mater. Syst. Struct. 4, 76 (1993).
9. D. J. Srolovitz, Acta Metall. 37, 621 (1989).
10. A. Pidduck, D. Robbins, A. Cullis, W. Leong, and A. Pitt, Thin Solid Films 222, 78 (1992).
11. I. Berbezier, B. Gallas, A. Ronda, and J. Derrien, Surf. Sci. (submitted).
12. B. Gallas, I. Berbezier, A. Ronda, and J. Derrien, Thin Solid Films 294, 22 (1997).
13. W. K. Liu, S. M. Mokler, N. Ohtani, C. Roberts, and B. A. Joyce, Surf. Sci. 264, 301 (1992).
14. R. Kern, Morphology of Crystals, edited by I. Sunagawa (Reidel, Dordrecht, 1987), Chap. 2, p. 79.
15. J. M. Bermond, J. J. Métois, X. Egéa, and F. Floret, Surf. Sci. 330, 48 (1995).
16. B. S. Swartzentruber, Y. W. Mo, M. B. Webb, and M. G. Lagally, J. Vac. Sci. Technol. A 7, 2901 (1989).
17. Y. N. Yang and E. D. Williams, J. Vac. Sci. Technol. A 8, 2481 (1990).
18. E. Suglia and M. Henzler, J. Vac. Sci. Technol. A 1, 1507 (1983).
19. R. M. Tromp and M. C. Reuter, Phys. Rev. 47, 7598 (1993).
20. O. L. Alerhand, A. N. Berker, J. D. Joannopoulos, D. Vanderbilt, R. J. Hamers, and J. E. Demuth, Phys. Rev. Lett. 64, 2406 (1990).
21. D. Chadi, Phys. Rev. Lett. 59, 1691 (1987).
22. J. Tersoff and E. Pehlke, Phys. Rev. B 47, 4072 (1993).
23. C. E. Aumann, J. J. de Miguel, R. Kariotis, and M. G. Lagally, Surf. Sci. 275, 1 (1992).
24. E. Schröder-Bergen and W. Ranke, Surf. Sci. 259, 323 (1991).
25. Y. Koide, S. Zaima, K. Itoh, N. Ohshima, and Y. Yasuda, J. Appl. Phys. 68, 2164 (1990).
26. E. D. Williams, R. J. Phaneuf, J. Wei, N. C. Bartelt, and T. L. Einstein, Surf. Sci. 294, 219 (1993).
27. 27J. Tersoff, Y. H. Phang, Z. Zhang, and M. G. Lagally, Phys. Rev. Lett. 75, 2730 (1995).
28. C. Duport, P. Nozieres, and J. Villain, Phys. Rev. Lett. 74, 134 (1995).
29. D. E. Jesson, K. M. Chen, S. J. Pennycook, T. Thundat, and R. J. Warmack, Phys. Rev. Lett. 77, 1330 (1996).