SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of the Korean Physical Society

Volumn 34, Issue SUPPL. 3, 1999, Pages

Fabrication and characterization of the ultra shallow junction diode with cobalt silicide contact

(3) Chang, Gee Keun a Chang, Ho Jung a Ohm, Woo Yong b

a Dankook University (South Korea)

b Inha University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000712757 PISSN: 03744884 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (2)

References (16)

1
- 0025256685
- C. M. Osburn, J. Electron Materials 19, 67 (1990).
- (1990) J. Electron Materials , vol.19 , pp. 67
- Osburn, C.M.¹

2
- 0003699181
- Lattice Press
- S. Wolf, Silicon Processing for the VLSI Era, V. 2-Process Integration, Lattice Press 154 (1990).
- (1990) Silicon Processing for the VLSI Era, V. 2-Process Integration , pp. 154
- Wolf, S.¹

3
- 0000204567
- J. Amano, K. Nauka, M. P. Scott, J. E. Turner and R. Tsai, Appl. Phys. Lett. 49, 737 (1986).
- (1986) Appl. Phys. Lett. , vol.49 , pp. 737
- Amano, J.¹ Nauka, K.² Scott, M.P.³ Turner, J.E.⁴ Tsai, R.⁵

4
- 0003679027
- McGraw-Hill
- S. M. Sze, VLSI Technology, McGraw-Hill, 397 (1988).
- (1988) VLSI Technology , pp. 397
- Sze, S.M.¹

5
- 1842732310
- C. Y. Ting, S. S. Iyer, C. M. Osburn, G. J. Hu and A. M. Schweighard, Proc. Electrochem. Soc. Meeting 82-2, 224 (1982).
- (1982) Proc. Electrochem. Soc. Meeting , vol.82 , Issue.2 , pp. 224
- Ting, C.Y.¹ Iyer, S.S.² Osburn, C.M.³ Hu, G.J.⁴ Schweighard, A.M.⁵

6
- 19544378032
- C. K. Lau, Y. C. See, D. B. Scott, J. M. Bridges, S. M. Perna and R. D. Davies, IEDM Tech. Dig. 714 (1982).
- (1982) IEDM Tech. Dig. , vol.714
- Lau, C.K.¹ See, Y.C.² Scott, D.B.³ Bridges, J.M.⁴ Perna, S.M.⁵ Davies, R.D.⁶

7
- 0023329252
- A. E. Morgan, E. K. Broadbeut, M. Delfino, B. Coulman and D. K. Sadana, J. Electrochern. Soc. 134, 925 (1987).
- (1987) J. Electrochern. Soc. , vol.134 , pp. 925
- Morgan, A.E.¹ Broadbeut, E.K.² Delfino, M.³ Coulman, B.⁴ Sadana, D.K.⁵

8
- 0023310380
- M. Tabaskky, E. S. Bulat, B. M. Pitchek, M. A. Sullivan and S. C. Shatas, IEEE Trans. Electron Devices 34, 548 (1987).
- (1987) IEEE Trans. Electron Devices , vol.34 , pp. 548
- Tabaskky, M.¹ Bulat, E.S.² Pitchek, B.M.³ Sullivan, M.A.⁴ Shatas, S.C.⁵

9
- 0023434831
- S. P. Murarka, D. B. Fraser, A. K. Sinha, H. J. Levinstein, E. J. Lloyd, R. Liu, D. S. Williams and S. J. Hillenius, IEEE Trans. Electron. Devices 34, 2108 (1987).
- (1987) IEEE Trans. Electron. Devices , vol.34 , pp. 2108
- Murarka, S.P.¹ Fraser, D.B.² Sinha, A.K.³ Levinstein, H.J.⁴ Lloyd, E.J.⁵ Liu, R.⁶ Williams, D.S.⁷ Hillenius, S.J.⁸

10
- 0005251181
- P. Ruterana, P. Houdy and P. Boher, J. Appl. Phys. 68, 1033 (1990).
- (1990) J. Appl. Phys. , vol.68 , pp. 1033
- Ruterana, P.¹ Houdy, P.² Boher, P.³

11
- 0025432246
- J. M. Phillips, J. L. Bastone, J. C. Hensel, I. Yu and M. Cerullo, J. Mater. Res. 5, 1032 (1990).
- (1990) J. Mater. Res. , vol.5 , pp. 1032
- Phillips, J.M.¹ Bastone, J.L.² Hensel, J.C.³ Yu, I.⁴ Cerullo, M.⁵

12
- 36549104477
- J. M. Gibson, J. L. Vastone and R. T. Tung, Appl. Phys. Lett. 51, 45 (1987).
- (1987) Appl. Phys. Lett. , vol.51 , pp. 45
- Gibson, J.M.¹ Vastone, J.L.² Tung, R.T.³

13
- 0022986079
- C. Y. Ting, F. M. dHeurle, S. S. Lyer and P. M. Fryer, J. Electrochem. Soc.: Solid-State Science and Technology 133, 2621 (1986).
- (1986) J. Electrochem. Soc.: Solid-State Science and Technology , vol.133 , pp. 2621
- Ting, C.Y.¹ Heurle, F.M.² Lyer, S.S.³ Fryer, P.M.⁴

14
- 0003926828
- Academic Press, New York
- S. P. Murarka, Slilicides for VLSI Applications (Academic Press, New York, 1983), p. 164.
- (1983) Slilicides for VLSI Applications , pp. 164
- Murarka, S.P.¹

15
- 0011827261
- S. L. Hsia, T. Y. Tan, P. Smith and G. E. McGuire, J. Appl. Phys. 72, 1864 (1992).
- (1992) J. Appl. Phys. , vol.72 , pp. 1864
- Hsia, S.L.¹ Tan, T.Y.² Smith, P.³ McGuire, G.E.⁴

16
- 36449000477
- S. L. Hsia, T. Y. Tan, P. Smith and G. E. McGuire, J. Appl. Phys. 70, 7579 (1991).
- (1991) J. Appl. Phys. , vol.70 , pp. 7579
- Hsia, S.L.¹ Tan, T.Y.² Smith, P.³ McGuire, G.E.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.