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Volumn 23, Issue 8, 2000, Pages
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Capability for 300 mm: approaching industry goals
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Author keywords
[No Author keywords available]
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Indexed keywords
APPLICATION SPECIFIC INTEGRATED CIRCUITS;
COMPACT DISKS;
DYNAMIC RANDOM ACCESS STORAGE;
MASKS;
SILICON WAFERS;
AUTOMATED TOOL RELIABILITY AND MAINTENANCE TRACKING;
COST OF OWNERSHIP;
WAFER DELIVERY SYSTEMS;
WAFER SIZE CONVERSION;
SEMICONDUCTOR DEVICE MANUFACTURE;
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EID: 0000711323
PISSN: 01633767
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (5)
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References (9)
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