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Volumn 23, Issue 8, 2000, Pages

Capability for 300 mm: approaching industry goals

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; COMPACT DISKS; DYNAMIC RANDOM ACCESS STORAGE; MASKS; SILICON WAFERS;

EID: 0000711323     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (5)

References (9)
  • 4
    • 6744266558 scopus 로고    scopus 로고
    • 300mm Conversion-Challenge and Breakthrough for Future Semiconductor Manufacturing
    • June
    • P. Kuecher et al , "300mm Conversion-Challenge and Breakthrough for Future Semiconductor Manufacturing," E-MRS'98 Conference, June 1998
    • (1998) E-MRS'98 Conference
    • Kuecher, P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.