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Volumn 55, Issue 26, 1989, Pages 2763-2765

Model for diffusion and trapping of hydrogen in crystalline silicon

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000699872 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.101947 Document Type: Article

Times cited : (25)

References (13)

2
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- (1985) Appl. Phys. Lett , vol.46 , pp. 787
- Johnson, N.M.¹ Moyer, M.D.²

5
- 34547246031
- The [formula omitted] data extrapolations we use are reduced by a factor of [formula omitted] to represent deuterium diffusion in accord with the isotope effect.
- (1956) Physica , vol.22 , pp. 849
- Van Wieringen, A.¹ Warmoltz, N.²

6
- 84931543035
- edited by C. K. Chen, P. L. F. Hemment, J. C. Sturm, and L. Pfeiffer (Materials Research Society, Pittsburgh, PA)
- (1988) Materials Research Society Symposium Proceedings , vol.Vol. 107 , pp. 105
- Myers, S.M.¹

7
- 5644233456
- edited by B. C. Larson, D. N. Seidman, and M. Rühle (Materials Research Society, Pittsburgh, PA)
- (1989) Materials Research Society Symposium Proceedings , vol.Vol. 138 , pp. 209
- Borenstein, J.T.¹ Angell, D.² Corhett, J.W.³

8
- 84952856879
- See, for example the review by, edited by R. A. Huggins, R. C. Bube, and D. A. Vermilyea (Annual Reviews Inc., Palo Alto, CA), Chap13.
- (1983) Annual Review of Materials Science
- Wert, C.A.¹ Frank, R.C.²

10
- 0000623738
- In contrast, the data in Fig. 2 of Ref. 2 yield [formula omitted] and indicate that process conditions differ from those of Ref. 4 analyzed here. Hydrogen levels in excess of [formula omitted] are observed over much of the region [formula omitted] suggesting that [formula omitted] formation may need to be included in analysis of this data. Additional analyses of the influence of [formula omitted] may be found in Ref. 3 and in the paper by, It is worth noting that [formula omitted] in Figs. 1 and 2 of Ref. 2 is predicted correctly with the same values of [formula omitted] used here when [formula omitted] formation is included.
- (1985) J. Electron. Mater , vol.14a , pp. 759
- Hall, R.N.¹

11
- 84952856880
- In general, [formula omitted] and R reflect the charge states of the diffusing hydrogen species and of the traps, and mediate the relationship between [formula omitted] and [formula omitted] so a similar analysis should be possible for n-type material. Preliminary analysis shows that qualitative agreement of a model including [formula omitted] formation and the data for re-type material in Fig. 2 of Ref. 2 is obtained with an R of about 1000 Å for the [formula omitted] reaction and less than [formula omitted] for the effective trap radius for P.

13
- 3643083679
- (1984) Appl. Phys. Lett , vol.45 , pp. 1135
- Dubé, C.¹ Hanoka, J.I.²

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