SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Applied Physics

Volumn 67, Issue 5, 1990, Pages 2195-2198

Density relaxation of silicon dioxide on (100) silicon during thermal annealing

(4) Taniguchi, K a Tanaka, M a Hamaguchi, C a Imai, K b

a OSAKA UNIVERSITY (Japan)

b TOSHIBA CORPORATION (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000696153 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.345563 Document Type: Article

Times cited : (57)

References (27)

1
- 1642621158
- (1965) J. Appl. Phys. , vol.36 , pp. 3770
- Deal, B.E.¹ Grove, A.S.²

2
- 0020143228
- (1982) Solid‐State Electron. , vol.25 , pp. 479
- Hamasaki, M.¹

3
- 0022013073
- (1985) J. Electrochem. Soc. , vol.132 , pp. 516
- Han, C.J.¹ Helms, C.R.²

4
- 0022144603
- (1985) J. Electrochem. Soc. , vol.132 , pp. 2486
- Taft, E.A.¹

5
- 0022162838
- (1985) J. Electrochem. Soc. , vol.132 , pp. 2815
- Srivastava, J.K.¹ Irene, E.A.²

6
- 0020930389
- (1983) J. Appl. Phys. , vol.54 , pp. 7153
- Fargeix, A.¹ Ghibaudo, G.²

7
- 0001391263
- (1985) IEEE Trans. Electron Devices , vol.ED‐32 , pp. 132
- Matsumoto, H.¹ Fukuma, M.²

8
- 0012623945
- (1989) Appl. Phys. Lett. , vol.54 , pp. 151
- Rafferty, C.S.¹ Lansberger, L.M.² Dutton, R.W.³ Tiller, W.A.⁴

9
- 0001545388
- (1987) Micromolecules , vol.20 , pp. 1070
- Rendell, R.W.¹ Ngai, K.L.² Fong, G.R.³ Aklonis, J.J.⁴

10
- 34547477575
- (1987) Phys. Rev. Lett. , vol.59 , pp. 213
- Ourmazd, A.¹ Taylor, D.W.² Rentschler, J.A.³ Bevk, J.⁴

11
- 84856121742
- in. Devine (Plenum, New York)
- (1987) Proceedings of a Symposium on the Physics and Technology of Amorphous [Formula Omitted] edited by R. A. B , pp. 297
- Revesz, A.G.¹ Mrstik, B.J.² Hughes, H.L.³

12
- 84950537506
- (1982) Acta Met. , vol.10 , pp. 691
- Borie, B.¹ Sparks, C.J.² Cathcart, J.V.³

13
- 0001461841
- (1977) Appl. Phys. Lett. , vol.30 , pp. 290
- EerNisse, E.P.¹

14
- 0004097995
- (Mir, Moscow).
- (1967) Theory of Elasticity
- Landau, L.¹ Lifschitz, E.²

15
- 0020205589
- (1982) J. Electrochem. Soc. , vol.129 , pp. 2594
- Irene, E.A.¹ Tierney, E.² Angillelo, J.³

16
- 0021374067
- (1984) J. Appl. Phys. , vol.55 , pp. 909
- Charitat, G.¹ Martinez, A.²

17
- 0002820455
- (1987) J. Vac. Sci. Technol. B , vol.5 , pp. 15
- Kobeda, E.¹ Irene, E.A.²

18
- 84954058999
- (Plenum, New York)
- (1987) Proceedings of a Symposium on the Physics and Technology of Amorphous [Formula Omitted] edited by R. A. B. Devine , pp. 307
- Rendell, R.W.¹ Ngai, K.L.²

19
- 21544464097
- (1979) Appl. Phys. Lett. , vol.35 , pp. 8
- EerNisse, E.P.¹

20
- 84978600625
- (1963) J. Am. Ceram. Soc. , vol.46 , pp. 470
- Mackenzie, J.D.¹

21
- 84950542106
- (Plenum, New York)
- (1987) Proceedings of a Symposium on the Physics and Technology of Amorphous [Formula Omitted] edited by R. A. B. Devine , pp. 315
- Ghibaudo, G.¹

22
- 0017534649
- (1977) J. Vac. Sci. Technol. , vol.14 , pp. 1064
- Pliskin, W.A.¹

23
- 0023399194
- (1987) J. Electrochem. Soc. , vol.134 , pp. 2020
- Mrstik, B.J.¹ Revesz, A.G.² Anacona, M.³ Hughes, H.L.⁴

24
- 0000741037
- (1983) Appl. Phys. Lett. , vol.42 , pp. 872
- Hu, S.M.¹

25
- 0021371462
- (1984) J. Am. Ceram. Soc. , vol.67 , pp. 151
- Nogami, M.¹ Tomozawa, M.²

26
- 0023855615
- (1988) IEEE Trans. Electron Devices , vol.ED‐35 , pp. 25
- Kao, D.B.¹ McVittie, J.P.² Nix, W.D.³ Saraswat, K.C.⁴

27
- 0015982665
- (1974) J. Non‐Cryst. Solids , vol.14 , pp. 288
- Shelby, J.E.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.