Comparison of the structure and electrical properties of thermal and plasma grown oxides on GaAs

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 996-1001

  Lefebvre, P R ^a   Lai, L ^a   Irene, E A ^a  

^a University of North Carolina at Chapel Hill   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000695997     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590057     Document Type: Review

References (23)

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