Low resistivity copper germanide on (100) Si for contacts and interconnections

Applied Physics Letters

Volumn 69, Issue 23, 1996, Pages 3560-3562

  Borek, M A ^a   Oktyabrsky, S ^a   Aboelfotoh, M O ^a   Narayan, J ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000684779     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117245     Document Type: Article

References (14)

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