Coexistence of hexagonal and orthorhombic structures in NiSi films containing Pt

Applied Physics Letters

Volumn 75, Issue 15, 1999, Pages 2214-2216

  Dai, J Y ^a   Mangelinck, D ^a   Lahiri, S K ^a  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000679088     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124968     Document Type: Article

References (13)

1. T. Ohguro, S. Nakajima, M. Koike, T. Morimoto, A. Nishiyama, Y. Ushiku, T. Yoshitomi, M. Ono, M. Saito, and H. Iwai, IEEE Trans. Electron Devices 41, 2305 (1994).
2. D. Mangelinck, J. Y. Dai, and S. K. Lahiri, Appl. Phys. Lett. 75, 1736 (1999).
3. D. Mangelinck, J. Y. Dai, S. K. Lahiri, C. S. Ho, and T. Osipowicz, Mater. Res. Soc. Symp. Proc. 564 (1999).
4. D. Mangelinck, P. Gas, I. M. Gay, B. Pichaud, and O. Thomas, J. Appl. Phys. 84, 2583 (1998).
5. T. G. Finstad, Thin Solid Films 51, 411 (1978).
6. F. Corni, B. Grignaffini Gregorio, G. Ottaviani, G. Queirolo, and J. P. Follegot, Appl. Surf. Sci. 73, 197 (1993).
7. G. Ottaviani, K. N. Tu, W. K. Chu, L. S. Hung, and J. W. Mayer, J. Appl. Phys. 53, 4903 (1982).
8. K. Toman, Acta Crystallogr. 4, 462 (1951).
9. F. d'Heurle, C. S. Petersson, J. E. E. Baglin, S. J. La Placa, and C. Y. Wong, J. Appl. Phys. 55, 4208 (1984).
10. H. Föll, P. S. Ho, and K. N. Tu, Philos. Mag. A 45, 31 (1982).
11. P. Stadelmann, Ultramicroscopy 31, 131 (1987).
12. H. von Känel, Mater. Sci. Rep. 8, 193 (1992).
13. Pearson's Handbook of Crystallographic Data for Intermetallic Phases, edited by P. Villars and L. D. Calvert (American Society for Metals, Metals Park, OH, 1985), Vol. 3.