Long term reproducibility of secondary ion mass spectroscopy measurements in silicon

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 5, 1996, Pages 3321-3326

  Chu, Paul K ^a   Smith, Stephen P ^b   Bleiler, Roger J ^c  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b CHARLES EVANS AND ASSOCIATES   (United States)

^c Evans Texas   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000648653     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588530     Document Type: Article

References (18)

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