Electron cyclotron resonance plasma etching of InP and related materials in BC13

Solid-State Electronics

Volumn 39, Issue 5, 1996, Pages 696-698

  Ren, F ^a   Hobson, W S ^a   Kuo, J M ^a   Lothian, J R ^c   Lopata, J ^c   Pearton, S J ^b   Caballero, J A ^b  

^a LUCENT TECHNOLOGIES   (United States)

^b UNIVERSITY OF FLORIDA   (United States)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000640765     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

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